Experience high precision and low cost of repetitive placement accuracy of ±1㎛ with the ‘High-Precision 3D Measurement System’.COMS Co.,Ltd


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High-Precision 3D Measurement System

Points to be noted

  • Uses unique technology to develop products
  • Sets products apart from the competition by maintaining its high accuracy even through product inspection

3D model measurements are of the utmost importance in research and development of precision devices such as semiconductors. On top of that, a device that maintains its precision and can have its settings easily changed through changing conditions and different test products is greatly desired.

The COMS high-precision 3D model measurement system (E-Measure3D System) is a no-contact, high-speed and high-precision instrument. The basis for which this instrument was built on lies in the ‘High-Precision Placement Technology’ COMS developed in 1998. The stage the object to be measured was put on would move along the X and Y axes via motion control technology to construct accurate placement information for it. However, COMS later used unique technology to create an automatic stage (Placement Stage) that would do everything from settings to construction. Because the measurement point is so accurate, many types of surface analysis became possible, and the previously unimaginable accuracy of ±1㎛ became a reality.

The placement stage comes in 3 standard sizes of 100 mm, 200 mm, and 300 mm, but depending on the object the stage size may even be increased to 500 mm. Even on a stage that large, the repetitive measurements never lose their high accuracy of ±1㎛, showing just how good COMS technology really is.

No-contact measurements makes nondestructive inspection possible. Contact during measurement may result in the shape of the object changing or damaging the delicate goods being measured.
The measurement is done by going across a rectangular area above the surface in a lattice pattern, taking in the XY coordinates and displacement. The methods of measurement are to have the device stop at each point, called ‘Interval Measurements (stop)’, measuring while the placement stage never stops, called ‘Interval Measurements (Continuous)’, and designating several areas for measurement called ‘Multiple Area Measurement’. Of these, continuous interval measurement allows for less time-loss and even faster measurement results.

The application software makes operation of the device simple. Put in the starting point and interval length, then click the start button to initiate the measurement. Having anyone be able to use it was one requirement to make such high speed measurements possible.

Also, the laser displacement sensor can be used on many different market products, resulting in low-cost operations. If you already use a different sensor, you can apply it to the device or switch out the laser displacement sensor to adjust for products of different sizes, allowing you to increase the resourcefulness of the device.

Displays the data in 3D and creates a cross section for part of the object

COMS also uses application software for 3D analyzations. Wafers used in the semiconductor industry can have their thickness, concavities and convexities all measured, point of contact buttons (metal domes) of products in the cell phone industry can get their surfaces measured, and many other 3D graphic analyses can be carried out.

They also sell application software that contains a 3D model measurement system that allows for laser displacement sensor selection and embedding based on the object to be measured.During this process, each embedding shipment is given an accuracy test for the whole system, and a document of results is printed with it. Shipment tests usually end when the product is seen to meet basic standards, but the analysis of this system goes above and beyond. Users say there are never discrepancies due to embedding and they feel at ease using it.

Currently, they are putting more resources into improving their versions of analysis technology and application software. They use many prototypes and research scenes, so automatic forwarding in excel has been a huge merit. However, not only will they be focusing on PC control, but in the future they will also develop PLC limiting. Once that has been done, they will be able to carry out automatic measurements right on the manufacturing line. They are moving forward with development, expecting it to be used for a wide variety of things including all-inclusive testing, machine assembly, placement measurement, and even ointment application.

【Video】High-Precision 3D Measurement System COMS E-Measure3D

Interview Date: August 8, 2018


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Not only do we have three axis robots with the highest positioning accuracy in the industry, we also have stages such as load bearing, high-speed, high-accuracy and rotation. We provide a wide variation of reasonably priced drive systems and stroke amounts. We can also fill custom orders to suit customer specifications. In addition, we offer a variety of systems such as a three-dimensional measuring system that can achieve non-contact surface profile high-accuracy measuring, and wafer thickness measuring.

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