Metal MEMS～fabrication technique of 3D structural part with micro scale accuracy～
Proposal of an integrated processing method of 3D structural parts- material, processing, and bonding
We would like to introduce a technology to stamp multiple numbers of different halls with a single press work on a stainless steel foil with 0.01mm thickness.
We have established a production technology which is bonding a multiple number of stamped metal foil at a low temperature and use them as micropump parts.
By doing so, we have realized MEMS parts with metal which could only be manufactured with an existing semiconductor process.
Required co-creator / business partner
Companies planning to launch a metal MEMS business
- Enterprise information
- We are developing processing technologies which will open the next generation based on the mass production processing technology of micro parts which was cultivated by the production of watch parts and fuel injection parts.
- Dealing structure
- We have an integrated system to work on R&D, prototyping, and mass production.